GLP(Grinding-Like Polishing)Using Magnetic Fluid -Surface Polishing Characteristics of Silicon Wafer-
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- SAKAYA Katsuaki
- Industrial Research Institute of Ishikawa
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- KUROBE Toshiji
- Faculty of Engineering, Kanazawa University
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- SUZUKI Shigenari
- Faculty of Engineering, Kanazawa University
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- HIROSAKI Kenichi
- Industrial Research Institute of Ishikawa
この論文をさがす
収録刊行物
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- International journal of the Japan Society for Precision Engineering
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International journal of the Japan Society for Precision Engineering 30 (2), 142-143, 1996-06-30
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詳細情報 詳細情報について
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- CRID
- 1570291224124715648
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- NII論文ID
- 10002161885
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- NII書誌ID
- AA1080710X
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- ISSN
- 0916782X
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- 本文言語コード
- en
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- データソース種別
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- CiNii Articles