Fabrication of a Linear Motion Microsystem on a Si Wafer

• MORONUKI Nobuyuki

  Faculty of Engineering, Tokyo Metropolitan University

• MIKAMI Yasuomi

  Ricoh Company, Ltd.

• FURUKAWA Yuji

  Faculty of Engineering, Tokyo Metropolitan University

Journal

• International journal of the Japan Society for Precision Engineering

  International journal of the Japan Society for Precision Engineering 30 (2), 168-169, 1996-06-30

Keywords

• micromachine
• anisotropic etching
• linear motion guide
• accuracy
• friction
• inchworm mechanism

Details

• CRID: 1570854174078171904
• NII Article ID: 10002161924
• NII Book ID: AA1080710X
• ISSN: 0916782X
• Text Lang: en
• Data Source:
  • CiNii Articles