Modulation Compensation of Circuit Pattern Detection Signals

• HARA Yasuhiko

  Production Engineering Research Laboratory, Hitachi, Ltd.

• DOI Hideaki

  Production Engineering Research Laboratory, Hitachi, Ltd.

• KARASAKI Koichi

  Product Planning Division, Computer Group

• IIDA Tadashi

  General Purpose Computer Division, Hitachi, Ltd.

• MINATANI Norihiro

  Hitachi Video and Information System, Inc.

• NOHARA Minoru

  Hitachi Video and Information System, Inc.

Journal

• International journal of the Japan Society for Precision Engineering

  International journal of the Japan Society for Precision Engineering 30 (3), 241-246, 1996-09-30

Keywords

• signal recovery
• compensation of modulation
• detection of pattern
• pattern inspection
• automated visual inspection

Details

• CRID: 1573668923845279872
• NII Article ID: 10002162026
• NII Book ID: AA1080710X
• ISSN: 0916782X
• Text Lang: en
• Data Source:
  • CiNii Articles