An Electrostatically Driven Torsional Resonator with Two Degrees of Freedom (Part 1) -The Principle and Characteristics of Motion-
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- USUDA Takashi
- National Research Laboratory of Metrology
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- UEDA Akira
- National Research Laboratory of Metrology
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Journal
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- International journal of the Japan Society for Precision Engineering
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International journal of the Japan Society for Precision Engineering 31 (2), 135-140, 1997-06-30
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Keywords
Details 詳細情報について
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- CRID
- 1573387448868487296
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- NII Article ID
- 10002162402
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- NII Book ID
- AA1080710X
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- ISSN
- 0916782X
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- Text Lang
- en
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- Data Source
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- CiNii Articles