Relationship between Parameter Estimation Method Based on Bode Diagram and Co-quad Diagram

• WAKUI Shinji

  Canon Inc., Semiconductor Production Equipment Development Center

Journal

• International journal of the Japan Society for Precision Engineering

  International journal of the Japan Society for Precision Engineering 31 (3), 227-231, 1997-09-30

Keywords

• Bode diagram
• co-quad diagram
• parameter
• estimation
• model parameter

Details

• CRID: 1571135649054739840
• NII Article ID: 10002162527
• NII Book ID: AA1080710X
• ISSN: 0916782X
• Text Lang: en
• Data Source:
  • CiNii Articles