Control of an Air Spring Type Isolated Apparatus Using Restored Positioning Signal

• WAKUI Shinji

  Canon Inc., Semiconductor Production Equipment Development Center

• ASADA Katsumi

  Canon Inc., Semiconductor Production Equipment Development Center

Journal

• Int. J. Japan Soc. Prec. Eng.

  Int. J. Japan Soc. Prec. Eng. 31 (4), 299-300, 1997-12-01

Keywords

• isolated table
• air spring
• positioning signal

Details

• CRID: 1573668923845146496
• NII Article ID: 10002162623
• NII Book ID: AA1080710X
• ISSN: 0916782X
• Text Lang: en
• Data Source:
  • CiNii Articles