Control of an Air Spring Type Isolated Apparatus Using Restored Positioning Signal

• WAKUI Shinji

  Canon Inc., Semiconductor Production Equipment Development Center

• ASADA Katsumi

  Canon Inc., Semiconductor Production Equipment Development Center

収録刊行物

• International journal of the Japan Society for Precision Engineering

  International journal of the Japan Society for Precision Engineering 31 (4), 299-300, 1997-12-01

キーワード

• isolated table
• air spring
• positioning signal

詳細情報

• CRID: 1573668923845146496
• NII論文ID: 10002162623
• NII書誌ID: AA1080710X
• ISSN: 0916782X
• 本文言語コード: en
• データソース種別:
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