An Investigation of a Unit-Machined Shape for the Three-Dimensional Micromachining of Silicon Surfaces with a Pulsed Ultraviolet Laser
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- NAMBA Yoshiharu
- Department of Mechanical Engineering, Chubu University
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- HE Liming
- Department of Mechanical Engineering, Chubu University
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Journal
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- International journal of the Japan Society for Precision Engineering
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International journal of the Japan Society for Precision Engineering 32 (1), 13-18, 1998-03-31
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Details 詳細情報について
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- CRID
- 1570572699101329152
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- NII Article ID
- 10002162660
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- NII Book ID
- AA1080710X
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- ISSN
- 0916782X
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- Text Lang
- en
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- Data Source
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- CiNii Articles