Development of Wire-sawing Technology for Manufacturing Compact Heat Sinks for VLSI Packages

• KOJIMA Masayasu

  Corporate Research and Development Laboratories, Sumitomo Metal Industries, Ltd.

• KUBOKI Takashi

  Corporate Research and Development Laboratories, Sumitomo Metal Industries, Ltd.

• TASAKA Masahito

  Corporate Research and Development Laboratories, Sumitomo Metal Industries, Ltd.

• HAYASHI Chihiro

  Sumitomo Metal Industries, Ltd.

• AIHARA Toshio

  Institute of Fluid Science, Tohoku Univ.

Journal

• International journal of the Japan Society for Precision Engineering

  International journal of the Japan Society for Precision Engineering 32 (2), 90-97, 1998-06-30

Keywords

• wire-sawing
• free abrasive machining
• heat sinks
• micro fins
• air-cooling large scale integrated circuits
• electronic equipments

Details

• CRID: 1574231873798660096
• NII Article ID: 10002162784
• NII Book ID: AA1080710X
• ISSN: 0916782X
• Text Lang: en
• Data Source:
  • CiNii Articles