レーザーアブレーション法による導波路型レーザー結晶の作製 -Si基板上への作製を目指して- Fabrication of Waveguide Laser Crystals by Laser Ablation Method -toward the Fabrication of Laser Crystals on Si Substrates-
OEIC (Optoelectronic integrated circuit) which interconnects various optical and electronic elements on thesame substrate, is a promising device in near future. The fabrication method ofoptical waveguides is desirableto be a vapor phase epitaxy and suitable for <I>in situ</I> processing. LPE (Liquid Phase Epitaxy) methods arewidely used to fabricate thin films, but recently much attention has been paid to PLD (Pulsed Laser Deposition) methods in the fabrication of optical thin films with various advantages such as adaptability to <I>in-situ</I>, processing, simple arrangement, stoichiometry of the films, epitaxial quality of complicated compoundmaterials as good as those by MBE (Molecular Beam Epitaxy) and MOCVD (Metal-Organic Chemical Vapor Deposition). In the present paper, it is experimentally shown that this PLD method is very effective andaffordable as fabrication techniques of these optical thin films.
レーザー研究 26(6), 415-420, 1998-06
The Laser Society of Japan