放射光励起プロセスの現状と将来展望 Synchrotron Radiation Stimulated Process -Present Status and Future Prospects-
The synchrotron radiation (SR) stimulated process is a new research field, of which studies started about 13 years ago. Up to now, experiments have been conducted mainly aiming the application to semiconductorprocesses and new material synthesis. In this report, after reviewing recent results of several SR stimulatedprocess experiments such as etching, chemical vapor deposition, epitaxial growth, and site specific processes, an application to the nano structure fabrications-nanometric process-is descrived as a future prospective one.
レーザー研究 26(6), 438-443, 1998-06
The Laser Society of Japan