高輝度放射光SPring-8における半導体材料プロセス研究への期待 Semiconductor Material Processes in Synchrotron Radiation SPring-8
Material processes related to semiconductor device manufacturing in research project in synchrotron radiationfacility, SPring-8, have been discussed. SPring-8 has 61 beamlines including 23 bending magnet beamlinesand 38 insertion device beamlines. Soft X-ray beamline in SPring-8 will be available for the materialprocessing near future and has 8-figure undulator which radiates strong polarized soft X-ray in energy range of 0.5-5 keV. Possibilities of the SR research are discussed showing the reported results. Research plans such as SR-CVD, SR-etching, surface modification, SR-ablation and their analyses have been proposed as effectivesubjects.
レーザー研究 26(6), 444-448, 1998-06
The Laser Society of Japan