Development of Photon-Counting Laser-Light-Scattering Method for Detection of Nano-Particles Formed in CVD Plasmas (レ-ザ-および放射光の半導体プロセス分野への応用特集号) Development of Photon-Counting Laser-Light-Scattering Method for Detection of Nano-Particles Formed in CVD Plasmas
A high sensitive photon-counting laser-light-scattering method for detection of nano-particles formed in CVDplasmas is developed to get information on nucleation and subsequent initial growth phase of particles. Size ofparticles is deduced from their diffusion after turning off discharge and their density is obtained using the sizeand absolute light scattering intensity. Using the developed method, we demonstrate detection of smallparticles down to a few nm in size and find the corresponding particle density is a high value of about 10<SUP>11</SUP>cm<SUP>-3</SUP> even in low pressure silane RF discharges of low RF power, which are commonly used to deposit highquality thin films.
レーザー研究 26(6), 449-452, 1998-06
The Laser Society of Japan