Projection Patterned KrF Excimer Laser Doping for Submicron Fabrication

• TOYODA Koichi

  Department of Applied Electronics, Faculty of Industrial Science & Technology Science University of Tokyo

• SUGIOKA Koji

  Laser Physical Engineering Laboratory, Institute of Physical and Chemical Research, RIKEN

収録刊行物

• レーザー研究

  レーザー研究 26 75-76, 1998-11-15

詳細情報

• CRID: 1573668923852577664
• NII論文ID: 10002250647
• NII書誌ID: AN00255326
• ISSN: 03870200
• 本文言語コード: en
• データソース種別:
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