高周波イオンプレーティングによる金・アルミニウム合金薄膜の形成 Deposition of Au-Al Alloy Films by RF Ion Plating

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抄録

Purple Au-Al alloy films were deposited on glass substrates using a radio frequency ion plating method. Au-Al alloys were used as source materials. The effects on the film of the source alloy composition and the evaporation time were studied. The color tones of the deposited films were measured using spectral reflectance and their crystal structures were studied by X-ray diffraction. As a result, a composition of Au 80%-Al 20% was chosed as the most suitable source alloy. The color tone of a film deposited from a single evaporation source changed from white to purple as the evaporation time increased. The intensity of the X-ray diffraction pattern of the AuAl<sub>2</sub> sharpened as the color tone of the film became more purpler. The purple color of the film became brighter after 1hour of heat annealing at 550°C in an atmosphere of Ar (8×10<sup>3</sup>Pa).

収録刊行物

  • 表面技術 = The Journal of the Surface Finishing Society of Japan  

    表面技術 = The Journal of the Surface Finishing Society of Japan 47(2), 163-167, 1996-02 

    The Surface Finishing Society of Japan

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各種コード

  • NII論文ID(NAID)
    10002255715
  • NII書誌ID(NCID)
    AN1005202X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    09151869
  • NDL 記事登録ID
    3926764
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z17-291
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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