Fe-P, Ni-Pめっき基板上へのダイヤモンド合成 Diamond Synthesis on Fe-P, Ni-P Plated Substrate

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Diamond particles and films can be synthesized from the vapor phase using CVD, but thus far this has been subject to restrictions on substrate materials, substrate temperature, and synthesis conditions. It is especially difficult to synthesize diamond on Fe and Ni substrates because of the diffusion of carbon and other factors.<br>In this study, we investigated diamond synthesis on Fe-P and Ni-P alloy plated substrates from a methane-hydrogen reaction gas system using microwave plasma CVD. Deposits were characterized by SEM, XRD and Raman spectroscopy. High quality diamond deposits were recognized on the Fe-P substrates. On the Ni-P substrates, it was found that both deposition rate and nucliation density increased in comparison to Si substrate. Diamond synthesis was possible using plating substrates such as Fe-P and Ni-P alloy, which are thought to suppress the diffusion of carbon into the substrate.

収録刊行物

  • 表面技術 = The Journal of the Surface Finishing Society of Japan  

    表面技術 = The Journal of the Surface Finishing Society of Japan 47(5), 438-442, 1996-05 

    The Surface Finishing Society of Japan

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各種コード

  • NII論文ID(NAID)
    10002256368
  • NII書誌ID(NCID)
    AN1005202X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    09151869
  • NDL 記事登録ID
    3960068
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z17-291
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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