Hybrid-Sulfnitriding of Ion-Nitriding and Sputtering.
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- HONG Sung-Pill
- Graduate School, Univ. of Ibaraki
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- TERAKADO Kazuyoshi
- Graduate School, Univ. of Ibaraki
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- YOKOTA Hitoshi
- School of Eng., Univ. of Ibaraki
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- URAO Ryoichi
- School of Eng., Univ. of Ibaraki
Bibliographic Information
- Other Title
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- イオン窒化とスパッタリングを組み合わせたプラズマ浸硫窒化
- イオン チッカ ト スパッタリング オ クミアワセタ プラズマ シンリュウ チ
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Abstract
SCM 435 was plasma-sulfnitrided at 823K for 3.6-18ks in a 30% N2-70% H2 mixing gas atmosphere at 665Pa by hybrid-treating ion-nitriding and sputtering of MoS2. MoS2 was positioned 20mm above the specimen and applied discharge voltages of 300-600V. Sulfnitriding layers formed on the specimen's surface were evaluated by EPMA, X-ray diffraction, microscopic observations and microhardness changes.<br>A 4-μm nitride (γ'-Fe4N) layer and a 400-μm nitrogen diffusion layer formed on specimens ion-nitrided without applying an electric potential. A 12-μm compound layer of sulfide (FeS) and nitride (ε-Fe2-3N and γ'-Fe4N) formed beneath the sulfide, and a 400-μm nitrogen diffusion layer formed on the surface of specimens plasma-sulfnitrided by applying an electric potential of 500V. The compound layer formed in plasma-sulfnitriding was thicker than in ion-nitriding. The compound layer thickness and surface hardness depend on specimen temperature, treatment time and the electric potential applied to MoS2. Mo and S were included in plasma-sulfnitrided compound layers. Surface hardness after plasma-sulfnitriding is higher than after conventional sulfnitriding. This may be due to Mo sputtered from the MoS2 target.
Journal
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- Journal of The Surface Finishing Society of Japan
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Journal of The Surface Finishing Society of Japan 47 (6), 518-523, 1996
The Surface Finishing Society of Japan
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Details 詳細情報について
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- CRID
- 1390001204115821312
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- NII Article ID
- 10002256552
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- NII Book ID
- AN1005202X
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- ISSN
- 18843409
- 09151869
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- NDL BIB ID
- 3976395
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed