Synthesis of Microwave Plasma CVD Diamond-Film on Variously-Coated Carbon-Steel Substrates.

• TANAKA Hiroyuki

  Hokkaido Industrial Research Inst.

• TANAKA Toshiaki

  Muroran Techno-center Foundation

• SOHMA Hideaki

  Muroran Techno-center Foundation

• YOSHIDA Masato

  Graduate School, Muroran Inst. of Tech. Present: Nihon Mekki Kogyo Co., Ltd.

• SAKAI Akira

  Muroran Inst. of Tech.

• SAITOH Hideyuki

  Muroran Inst. of Tech.

• MISAWA Toshihei

  Muroran Inst. of Tech.

Bibliographic Information

Other Title

• マイクロ波プラズマＣＶＤ法による種々の表面処理を施した炭素鋼基板でのダイヤモンド膜合成
• マイクロハ プラズマ CVDホウ ニヨル シュジュ ノ ヒョウメン ショリ オ

Abstract

Diamond films were synthesized by microwave plasma chemical vapor deposition (CVD) on carbon steels with various surface treatments, including gas carbonitriding, carburizing and TiN coating. Films were analyzed for their crystallinity using Raman microprobe spectroscopy. On pure iron substrates and carbon steel with gas carbonitriding and carburizing, diamond films containing amorphous carbon grew over the powder-like graphite that was formed. On TiN-coated carbon steel substrates, diamond films with excellent crystallinity grew without the formation of the powder-like graphite. This suggests that the TiN layer inhibits Fe atom diffusion. Crystallinity and the ratio of amorphous carbon contents of diamond film have little dependence on the carbon content of the steels used in this study.

Journal

• Journal of The Surface Finishing Society of Japan

  Journal of The Surface Finishing Society of Japan 47 (7), 611-615, 1996

  The Surface Finishing Society of Japan

Keywords

• Diamond
• CVD
• Microwave Plasma
• Carbon Steel
• TiN

Details

• CRID: 1390001204113671296
• NII Article ID: 10002256789
• NII Book ID: AN1005202X
• DOI: 10.4139/sfj.47.611
• ISSN: 18843409
• ISSN: 09151869
• NDL BIB ID: 3995261
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3995261
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed