レーザ弾性表面波の速度分散解析によるめっき層特性の非接触評価 Noncontact Evaluation of Plated Layer Properties Using the Velocity Dispersion of Laser Surface Acoustic Waves

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抄録

The purpose of this study is to evaluate the thickness, elastic constants, and bond quality of the electroplated metallic layer by using the quantitative analysis of the velocity dispersion of laser surface acoustic waves (SAWs). SAWs were nondestructively generated by a Q-switched YAG laser and monitored using a heterodyne laser interferometer, without inducing thermal damages. The group velocity dispersion obtained by wavelet transform was compared to the analytical velocity dispersion of Rayleigh and Lamb waves. The thickness and elastic stiffness of the well bond layer were estimated by quantitatively analyzing the velocity dispersion of the Rayleigh wave. The velocity dispersion of the 0th order symmetric and antisymmetric Lamb waves was used to estimate the thickness and quality of the delaminated layer. The bond quality could not be estimated, however, because the weak bond area was too small in comparison to the larger SAW propagation distance.

収録刊行物

  • 表面技術 = The Journal of the Surface Finishing Society of Japan  

    表面技術 = The Journal of the Surface Finishing Society of Japan 47(9), 790-795, 1996-09 

    The Surface Finishing Society of Japan

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各種コード

  • NII論文ID(NAID)
    10002257182
  • NII書誌ID(NCID)
    AN1005202X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    09151869
  • NDL 記事登録ID
    4028869
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z17-291
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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