反応性イオンプレーティング法による金・窒化アルミニウム複合薄膜の形成

• 上條 幹人

  山梨県工業技術センター

• 有泉 直子

  山梨県工業技術センター

• 日原 政彦

  山梨県工業技術センター

• 児嶋 弘直

  山梨大学 工学部

書誌事項

タイトル別名

• AuAlN Composite Films Formed by Reaction Ion Plating Method.
• ハンノウセイ イオン プレーティングホウ ニヨル キン チッカ アルミニウム

抄録

Deposition of black-colored films whose mayor component is gold using the RF ion plating method was investigated, and the results were evaluated. Au-Al alloys were used as the evaporation source material. AlN was first produced by the reactive ion plating method using nitrogen gas as the reactive gas and the evaporation conditions of Au and AlN composite black films were then studied. Black Au-AlN composite films with high corrosion resistance were obtained on the substrate under conditions of an RF power of 150W, a bias voltage of 500V and an evaporation rate of 36nm/min. To examine the potential for commercial use, the same lustrous black composite films were produced on post earrings (K18 and K14) under the same conditions as mentioned above. These results open up new possibilities for design of ornaments and production of value-added goods.

収録刊行物

• 表面技術

  表面技術 48 (1), 36-41, 1997

  一般社団法人 表面技術協会

キーワード

• Reactive Ion Plating
• Au·AIN Composited Film
• Black Film

詳細情報

• CRID: 1390282679091040000
• NII論文ID: 10002258107
• NII書誌ID: AN1005202X
• DOI: 10.4139/sfj.48.36
• ISSN: 18843409
• ISSN: 09151869
• NDL書誌ID: 4118794
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4118794
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可