アルミニウム合金上に生成したDLC膜の摩擦・摩耗特性 [in Japanese] Friction and Wear Properties of DLC Films Deposited on Aluminum Alloy [in Japanese]
Access this Article
Search this Article
Hard diamond-like-carbon (DLC) films were deposited on aluminum alloy (JIS A6063) substrate by RF plasma CVD using CH<sub>4</sub> and H<sub>2</sub> as reactant gas. CH<sub>4</sub> concentration, deposition time, and RF power were varied to determine preferable deposition conditions that would not cause undesirable softening of the substrate during the deposition process. The thickness of DLC film was about 4μm under conditions of gas pressure: 27Pa, CH<sub>4</sub>: 30%, RF power: 300W, and deposition time: 3h.<br>Friction and wear experiments were conducted using a reciprocating friction and wear test apparatus. DLC film deposited under the above conditions was slid against bearing steel (JIS SUJ 2) balls to investigate fundamental friction and wear properties from room temperature to 200°C. The results were compared with those for substrate without the deposited DLC film. With the DLC film, friction and wear in the aluminum alloy were greatly reduced up to 100°C. The above results suggest that DLC film should improve the tribological performance of aluminum alloys used for sliding parts.
- Jitsumu Hyomen Gijutsu
Jitsumu Hyomen Gijutsu 48(2), 213-218, 1997-02-01
The Surface Finishing Society of Japan