直流重畳パルスめっき法による結晶／非晶質Ｃｏ‐Ｆｅ‐Ｐ軟磁性多層膜の作製

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タイトル別名
  • Crystal/Amorphous Multilayered Co-Fe-P Soft Magnetic Films Prepared by Pulsating Current.
  • チョクリュウ チョウジョウ パルス メッキホウ ニヨル ケッショウ ヒショウシ

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抄録

Co-Fe-P soft magnetic films for thin film heads were prepared by electroplating. The amorphous phase was obtained at a current density of 5mA/cm2, and the crystal phase at 20mA/cm2. The values of Bs in the amorphous phase was 1.2T and of He 4Oe. The value of Bs in the crystal phase was 1.8T and of He 27Oe. Co-Fe-P crystal/amorphous multilayered films were fabricated by pulsating current between 5 and 20mA/cm2. When one layer was about 100-200nm thick, the values of Bs and He were about equal to the mean values of the crystal and amorphous phases. A layer of 10nm thick had excellent soft magnetic properties; Bs did not decrease (1.6T), but the He was low (6Oe) and close to that of the amorphous film.

収録刊行物

  • 表面技術

    表面技術 48 (5), 544-548, 1997

    一般社団法人 表面技術協会

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