Formation of TiC-TiN Composite Films by RF Sputtering and Their Tribological Properties.

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  • ＲＦスパッタリングによるＴｉＣ‐ＴｉＮ複合皮膜の作製とそのトライボロジー特性
  • RF スパッタリング ニヨル TiC-TiN フクゴウ ヒマク ノ サクセイ

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Abstract

TiC-TiN binary system films were prepared by rf magnetron sputtering using a TiC-TiN compound target. Film chemical composition and structural changes were examined by chemical state analysis, using electron probe microanalysis (EPMA), scanning electron microscopy (SEM) and x-ray diffraction (XRD). Tribological properties of the films were studied using a pin-on-plate type reciprocating friction tester. The value of x exhibited by the TiCxN1-x system ranged from 022 to 0.74 as a function of deposition position. The crystal structure of TiCxN1-x films formed TiC-TiN system solid solutions. The microvickers hardness of the films increased with x, reaching a maximum at around 0.69. The microvickers hardness also increased as the (200) preferred orientation increased. The rate of wear TiCxN1-x (x=0.22∼0.74) films decreased with x, exhibiting a minimum value at about 0.4∼07. The friction coefficient decreased steadily with x, reaching a minimum at 0.4.

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