Electrochemical Impedance Property of Ti1-xAlxN Films Prepared by Dynamic Ion Mixing Method.
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- KAMIYA Makoto
- Graduate School, Kogakuin Univ
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- NAKAMURA Isao
- Graduate School, Kogakuin Univ
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- TAKANO Ichiro
- Fac. of Eng., Kogakuin Univ
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- SAWADA Yoshio
- Fac. of Eng., Kogakuin Univ
Bibliographic Information
- Other Title
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- ダイナミックイオンミキシング法によるTi1-xAlxN膜の電気化学インピーダンス特性
- ダイナミック イオン ミキシングホウ ニヨル Ti1-xAlxN マク ノ デ
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Abstract
The advanced coating material TiAlN has higher corrosion resistance than TiN without Al content. TiAlN films are conventionally prepared by sputtering using a target with fixed Ti and Al composition. We prepared Ti1-xAlxN films using a dynamic ion mixing apparatus with two electron-beam evaporation sources for Ti and Al deposition. Ti and Al contents of films were changed by independently controlling the evaporation rate of the two sources at a constant N concentration of 30%. This system controls the film Ti and Al composition ratio (value x) precisely.<br>Electrochemical film properties were measured using AC impedance and a fast Fourie transform analyzer. The measurement cell was constructed from two Ti1-xAlxN film samples coated on stainless steel used as electrodes in an HCl solution of 1mol/dm3. The equivalent circuit of the cell based on a typical parallel circuit, took film resistance Rf and capacity Cf into consideration and was determined by P-Spice simulation. Electrochemical properties were evaluated using interfacial resistance Rt, electrical double-layer capacity Cd and time constant Rt×Cd parameters. The Ti and Al composition ratio for optimum corrosion resistance was x=03.
Journal
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- Journal of The Surface Finishing Society of Japan
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Journal of The Surface Finishing Society of Japan 48 (9), 913-918, 1997
The Surface Finishing Society of Japan
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Details 詳細情報について
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- CRID
- 1390001204113662336
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- NII Article ID
- 10002259832
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- NII Book ID
- AN1005202X
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- ISSN
- 18843409
- 09151869
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- NDL BIB ID
- 4304535
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed