Vacuum Equipment and Application for Thin Film in the Multimedia. Mass Production System for Optical Disc and DVD.

• OHTA Atsushi

  ULVAC JAPAN Ltd., Inst. for Super Materials

• IGARASHI Hideo

  ULVAC JAPAN Ltd., Inst. for Super Materials

• KISE Toshihiko

  ULVAC JAPAN Ltd., Electronics Equipment Div.

• NAGASAWA Shoji

  ULVAC JAPAN Ltd., Electronics Equipment Div.

Bibliographic Information

Other Title

• マルチメディア時代における真空装置と薄膜応用　　光ディスク・ＤＶＤ量産装置
• ヒカリ ディスク DVD リョウサン ソウチ

Journal

• Journal of The Surface Finishing Society of Japan

  Journal of The Surface Finishing Society of Japan 48 (11), 1065-1069, 1997

  The Surface Finishing Society of Japan

Keywords

• Single Disc System
• Sputtering Equipment
• Optical Disc
• DVD

Details

• CRID: 1390282679090843904
• NII Article ID: 10002260168
• NII Book ID: AN1005202X
• DOI: 10.4139/sfj.48.1065
• ISSN: 18843409
• ISSN: 09151869
• NDL BIB ID: 4334594
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4334594
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles