Vacuum Equipment and Application for Thin Film in the Multimedia. Deposition System for GMR Films.

• TSUNEKAWA Koji

  ANELVA Corp.

Bibliographic Information

Other Title

• マルチメディア時代における真空装置と薄膜応用　　ＧＭＲ膜と成膜装置
• GMR マク ト セイマク ソウチ

Journal

• Journal of The Surface Finishing Society of Japan

  Journal of The Surface Finishing Society of Japan 48 (11), 1076-1081, 1997

  The Surface Finishing Society of Japan

Keywords

• GMR Films
• Multilayers
• Deposition System
• UHV Sputtering System

Details

• CRID: 1390001204115903744
• NII Article ID: 10002260188
• NII Book ID: AN1005202X
• DOI: 10.4139/sfj.48.1076
• ISSN: 18843409
• ISSN: 09151869
• NDL BIB ID: 4334596
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4334596
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles