ZnO下地によるMnZnフェライト膜の作製および磁気特性 Preparation of MnZn ferrite films on ZnO under layer and their magnetic properties

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抄録

MnZn ferrite thin films were prepared on quartz substrate buffered by ZnO under layer by r.f. magnetron-sputtering method. ZnO under layer film was formed as preferentially (001) oriented film in any thickness. When as-deposited Mn-Zn-Fe oxide films on ZnO under layer were annealed in reduced atmosphere at 800°C for 5 hours, single phase of spinel-type ferrite was formed. The films were preferentially crystal-oriented to [111] direction normal to the film. The thinner ZnO under layer successfully induced the (111) orientation in plane because of good lattice matching between ZnO and spinel phase. The film of Mn:Zn:Fe=23:9:68 composition had the value of saturation magnetization of 410 emu/cc. The relationship between composition and magnetization of the films was similar to that of the bulks. The (111) oriented films are expected to have high permeability and prominent frequency characteristics.

収録刊行物

  • 粉体および粉末冶金  

    粉体および粉末冶金 46(2), 141-146, 1999-02-15 

    Japan Society of Powder and Powder Metallurgy

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各種コード

  • NII論文ID(NAID)
    10002261801
  • NII書誌ID(NCID)
    AN00222724
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    05328799
  • NDL 記事登録ID
    4655508
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z17-274
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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