全反射X線侵入深さの評価 [in Japanese] Evaluation of the Penetration Depth of Total-reflection X-rays [in Japanese]
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We have studied an experimental method to evaluate the penetration depth of total-reflection x-rays, which is an important factor for total-reflection x-ray analysis. The penetration depth can be evaluated by measuring the takeoff-angle dependence of x-ray fluorescence. We have developed a new glancing-incidence and glancing-takeoff x-ray analytical apparatus. Using this apparatus, we evaluated the penetration depth of Mo K<SUB>α</SUB> into a GaAs wafer. The experimental results agreed well with the theoretical penetration depth.
- J. Surf. Sci. Soc. Jpn.
J. Surf. Sci. Soc. Jpn. 18(7), 424-428, 1997-07
The Surface Science Society of Japan