STMによるナノデバイス作製・評価システムの開発 Development of STM-based Nanofabrication and Measurement System for Nano Devices

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抄録

We have developed a nanofabrication and measurement system for nano-devices such as single electron transistors. This system can perform all of the required processes in ultrahigh vacuum, such as preparation of substrate surface, fabrication of metallic electrodes on a substrate using a precise mask deposition equipment, nanofabrication of gold dots and lines using a scanning tunneling microscope (STM), and measurement of electric properties of the nano-devices using a low temperature four-contact probe apparatus. Using a novel atom transfer method from the gold tips, highly reproducible fabrication of gold nano-dots and nano-lines have been demonstrated here. Some technical innovations required for this development are briefly introduced.

収録刊行物

  • 表面科学  

    表面科学 18(8), 460-465, 1997-08 

    The Surface Science Society of Japan

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各種コード

  • NII論文ID(NAID)
    10002264826
  • NII書誌ID(NCID)
    AN00334149
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    03885321
  • NDL 記事登録ID
    4266098
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z15-379
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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