Development of STM-based Nanofabrication and Measurement System for Nano Devices.
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- FUJITA Daisuke
- National Research Institute for Metals
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- SHENG Hanyu
- National Research Institute for Metals
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- JIANG Qidu
- National Research Institute for Metals
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- DONG Zhenchao
- National Research Institute for Metals
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- NEJOH Hitoshi
- National Research Institute for Metals
Bibliographic Information
- Other Title
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- STMによるナノデバイス作製・評価システムの開発
- STM ニヨル ナノ デバイス サクセイ ヒョウカ システム ノ カイハツ
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Abstract
We have developed a nanofabrication and measurement system for nano-devices such as single electron transistors. This system can perform all of the required processes in ultrahigh vacuum, such as preparation of substrate surface, fabrication of metallic electrodes on a substrate using a precise mask deposition equipment, nanofabrication of gold dots and lines using a scanning tunneling microscope (STM), and measurement of electric properties of the nano-devices using a low temperature four-contact probe apparatus. Using a novel atom transfer method from the gold tips, highly reproducible fabrication of gold nano-dots and nano-lines have been demonstrated here. Some technical innovations required for this development are briefly introduced.
Journal
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- Hyomen Kagaku
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Hyomen Kagaku 18 (8), 460-465, 1997
The Surface Science Society of Japan
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Details
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- CRID
- 1390282681431769600
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- NII Article ID
- 10002264826
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- NII Book ID
- AN00334149
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- COI
- 1:CAS:528:DyaK2sXmsF2rtbc%3D
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- ISSN
- 18814743
- 03885321
- http://id.crossref.org/issn/03885321
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- NDL BIB ID
- 4266098
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed