Development of STM-based Nanofabrication and Measurement System for Nano Devices.

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Other Title
  • STMによるナノデバイス作製・評価システムの開発
  • STM ニヨル ナノ デバイス サクセイ ヒョウカ システム ノ カイハツ

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Abstract

We have developed a nanofabrication and measurement system for nano-devices such as single electron transistors. This system can perform all of the required processes in ultrahigh vacuum, such as preparation of substrate surface, fabrication of metallic electrodes on a substrate using a precise mask deposition equipment, nanofabrication of gold dots and lines using a scanning tunneling microscope (STM), and measurement of electric properties of the nano-devices using a low temperature four-contact probe apparatus. Using a novel atom transfer method from the gold tips, highly reproducible fabrication of gold nano-dots and nano-lines have been demonstrated here. Some technical innovations required for this development are briefly introduced.

Journal

  • Hyomen Kagaku

    Hyomen Kagaku 18 (8), 460-465, 1997

    The Surface Science Society of Japan

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