RHEED-AES Observation of Sb Desorption on a Single-Domain Si(001)2*1 Surface.

• KIM Ki-Seon

  Research Institute for Scientific Measurements, Tohoku University

• TAKAKUWA Yuji

  Research Institute for Scientific Measurements, Tohoku University

• ABUKAWA Tadashi

  Research Institute for Scientific Measurements, Tohoku University

• KONO Shozo

  Research Institute for Scientific Measurements, Tohoku University

Bibliographic Information

Other Title

• RHEED-AES Observation of Sb Desorption on a Single-Domain Si(001)2×1 Surface
• RHEED-AES Observation of Sb Desorption

Abstract

Sb desorption on a single-domain Si(001)2×1 surface has been studied using grazing-incidence reflection high energy electron diffraction and Auger electron spectroscopy (RHEED-AES). From the time evolution of Sb coverage, θ_Sb, during Sb desorption as monitored from Sb MNN Auger spectra, we have found that the Sb desorption kinetics are divided into two coverage regions; (I) 1 ML>θ_Sb>0.3 ML and (II) 0.3 ML>θ_Sb>0 ML. It was also found that the Sb desorption is a first-order reaction in each coverage region with activation energies of (I) 3.61 eV and (II) 3.63 eV and pre-exponential factors of desorption coefficient of (I) 2.9×10¹⁵ S^-1 and (II) 5.0×10¹⁵ S^-1. This difference in pre-exponential factor is explained in term of the change in the morphology and structure of Sb layer as monitored by RHEED.

Journal

• Hyomen Kagaku

  Hyomen Kagaku 18 (8), 501-505, 1997

  The Surface Science Society of Japan

Details

• CRID: 1390282681431776128
• NII Article ID: 130003683739
• NII Article ID: 10002264940
• NII Book ID: AN00334149
• DOI: 10.1380/jsssj.18.501
• ISSN: 18814743
• ISSN: 03885321
• NDL BIB ID: 4266105
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4266105
• Web Site: http://www.jstage.jst.go.jp/article/jsssj1980/18/8/18_8_501/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed