レーザープラズマX線源を用いた顕微光電子分光技術 Photoelectron Micro-Spectroscopy with a Laser-Plasma X-ray Source

この論文にアクセスする

この論文をさがす

著者

抄録

A photoelectron micro-spectroscopy system with a laser-plasma x-ray source is being developed to achieve a submicron spatial resolution in an in-house system. Although a laser-plasma source has an ultra-high peak brilliance, timeaveraged power is relatively low because its emitting duration is very short and the duty factor is low even at a high-rep rate operation. However, two spectroscopical ideas in our system are making the "source brilliance limited"; spatial resolution of the system very high. One idea is the use of a filter to select a single line from the x-ray source, and the other is the time-of-flight method for the electron energy analysis. Experimental results obtained so far are presented and advantages of our method and future prospects are discussed.

収録刊行物

  • 表面科学  

    表面科学 20(3), 148-154, 1999-03-10 

    The Surface Science Society of Japan

参考文献:  6件

参考文献を見るにはログインが必要です。ユーザIDをお持ちでない方は新規登録してください。

各種コード

  • NII論文ID(NAID)
    10002267279
  • NII書誌ID(NCID)
    AN00334149
  • 本文言語コード
    JPN
  • 資料種別
    REV
  • ISSN
    03885321
  • NDL 記事登録ID
    4679530
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z15-379
  • データ提供元
    CJP書誌  NDL  J-STAGE 
ページトップへ