レーザープラズマX線源を用いた顕微光電子分光技術 Photoelectron Micro-Spectroscopy with a Laser-Plasma X-ray Source
A photoelectron micro-spectroscopy system with a laser-plasma x-ray source is being developed to achieve a submicron spatial resolution in an in-house system. Although a laser-plasma source has an ultra-high peak brilliance, timeaveraged power is relatively low because its emitting duration is very short and the duty factor is low even at a high-rep rate operation. However, two spectroscopical ideas in our system are making the "source brilliance limited"; spatial resolution of the system very high. One idea is the use of a filter to select a single line from the x-ray source, and the other is the time-of-flight method for the electron energy analysis. Experimental results obtained so far are presented and advantages of our method and future prospects are discussed.
表面科学 20(3), 148-154, 1999-03-10
The Surface Science Society of Japan