近接場光学顕微鏡の基本性能とその応用分野 Basic Performance of Near-Field Optical Microscope and Its Applications
The principles of aperture- and scattering (apertureless)-type near-field optical microscopies (NOM), their related techniques, and their applications are summarized. In terms of a key device of the aperture-type NOM, the functional performance of an optical fiber probe with a small metal aperture is demonstrated through measurement of the photoluminescence image of single quantum dots. In the range of 50-100nm spatial resolution, the aperture-type NOM is an established and reliable technique for the spectroscopy of highly localized structures: spatially resolved spectroscopy of the surface of semiconductor materials or spectroscopic analysis of single particles, such as single molecules, single quantum dots, single metal particles, and so on. The scattering-type NOM, on the other hand, is a promising device to be applied to the surface enhanced spectroscopy, nano-manufacturing, and high density optical memory with higher spatial accuracy and higher efficiency.
表面科学 20(5), 344-351, 1999-05-10
The Surface Science Society of Japan