塩素吸着シリコン表面のレーザー励起エッチング Laser-induced Etching of Chlorinated Silicon Surfaces

この論文にアクセスする

この論文をさがす

著者

抄録

Measurements of excitation spectra of photoetching of chlorinated Si(111)7×7 surfaces stimulated by ultraviolet nanosecond pulse laser light revealed that there are two distinct spectral peaks, one (α-peak) being located near 290nm and another (β-peak) at 245 nm. The α-peak exhibits a strong supralinear dependence on light intensity above laser fluence of∼100mJ/cm<SUP>2</SUP> pulse, while the β-peak grows linearly with light intensity. The red shift of the α-peak with increasing intensity coincides with the shift of laser abration, which strongly suggests that the origin of the α-peak photoetching is thermal etching enhanced by surface heating due to interband transition in the substrate. The dependence on polarization of the incident light suggests that the β-peak photoetching originates in excitation of hot carriers in the substrate which are captured resonantly by the anti-bonding states of the adsorbate chlorides resulting in destabilization of the molecules.

収録刊行物

  • 表面科学

    表面科学 20(6), 393-400, 1999-06-10

    The Surface Science Society of Japan

参考文献:  26件中 1-26件 を表示

  • <no title>

    BOLAND J. J.

    Science 248, 838, 1990

    被引用文献6件

  • <no title>

    SCHNELL R. D.

    Phys. Rev. B32, 8057, 1985

    被引用文献6件

  • <no title>

    GUPTA P.

    Surf. Sci. 249, 92, 1991

    被引用文献10件

  • <no title>

    OKANO H.

    J. Appl. Phys. 24, 68, 1985

    被引用文献1件

  • <no title>

    KULLMER R.

    Appl. Phys. A 43, 227, 1987

    被引用文献2件

  • <no title>

    RHODIN T. N.

    Surf. Sci. 283, 109, 1993

    被引用文献2件

  • <no title>

    SZABO A.

    Surf. Sci. 312, 284, 1994

    被引用文献9件

  • <no title>

    PAULSEN-BOAZ C. M.

    Surf. Sci., 79-80, 1994

    被引用文献1件

  • <no title>

    ROHDIN T. N.

    Surf. Sci. 363, 240, 1996

    被引用文献1件

  • <no title>

    HATTORI K.

    Condens. Matter 8, 6543, 1996

    被引用文献1件

  • <no title>

    MOGYOROSI P.

    Appl. Phys. A 45, 293, 1988

    被引用文献1件

  • <no title>

    CHEN X. H.

    Surf. Sci. 376, 77, 1997

    被引用文献3件

  • <no title>

    DURBIN T. D.

    Surf. Sci. 316, 257, 1994

    被引用文献1件

  • <no title>

    NAKATSUJI K.

    Surf. Sci. 363, 321, 1996

    被引用文献1件

  • <no title>

    RHODIN T.

    Progr. Surf. Sci. 50, 131, 1995

    被引用文献1件

  • <no title>

    CARSLAW H. S.

    Conduction of Heat in Solids, 1959

    被引用文献43件

  • <no title>

    ZHU X. -Y.

    Chem. Phys. Lett. 176, 459, 1991

    被引用文献1件

  • <no title>

    AOTO N.

    Surf. Sci. 199, 408, 1988

    被引用文献3件

  • <no title>

    SCHLUTER M.

    Phys. Rev. B 17, 716, 1978

    被引用文献2件

  • <no title>

    SHEN T. C.

    Surf. Sci. 390, 35, 1997

    被引用文献2件

  • <no title>

    STOKBRO K.

    Phys. Rev. Lett. 80, 2618, 1998

    被引用文献5件

  • <no title>

    STIPE B. C.

    Phys. Rev. Lett. 78, 4410, 1997

    被引用文献10件

  • <no title>

    BABA M.

    Appl. Phys. Lett. 64, 2852, 1994

    被引用文献4件

  • <no title>

    SESSELMANN W.

    J. Vac. Sci. Technol. B 7, 1284, 1989

    DOI 被引用文献5件

  • <no title>

    SUGURI M.

    J. Phys. : Condens. Matter 5, 6607, 1993

    DOI 被引用文献2件

  • <no title>

    BOLAND J.

    Science 262, 1703, 1993

    被引用文献10件

各種コード

  • NII論文ID(NAID)
    10002268107
  • NII書誌ID(NCID)
    AN00334149
  • 本文言語コード
    JPN
  • 資料種別
    REV
  • ISSN
    03885321
  • NDL 記事登録ID
    4757713
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z15-379
  • データ提供元
    CJP書誌  NDL  J-STAGE 
ページトップへ