Measurement method for the thermal diffusivity of thin film which sticks on substrate.

• TAKABATAKE Nobuya

  Dept. Electronic and Electrical Eng., KANAGAWA lnstitute of Technology

• KOBAYASHI Takeshi

  Dept. Electronic and Electrical Eng., KANAGAWA lnstitute of Technology

Bibliographic Information

Other Title

• 基板に密着した薄膜の熱拡散率の測定法
• キバン ニ ミッチャクシタ ハクマク ノ ネツ カクサンリツ ノ ソクテイホウ

Abstract

New measurement methods to determine the thermal diffusivity of thin films without measuring heat characteristics for substrates have been proposed in this paper. We propose two kinds of methods for the measurement of thermal diffusivity of thin film: one for thin film that is placed in contact with front surface of substrate, and the other for thin film that is placed in contact with rear surface of substrate. lt was confirmed that measurement values agreed with reported values within range of error of thickness measurement for thin films.

Journal

• Netsu Bussei

  Netsu Bussei 11 (2), 46-52, 1997

  JAPAN SOCIETY OF THERMOPHYSICAL PROPERTIES

Keywords

• Pharmacology (medical)

Details

• CRID: 1390001204667005824
• NII Article ID: 10002395800
• NII Book ID: AN10064743
• DOI: 10.2963/jjtp.11.46
• COI: 1:CAS:528:DyaK2sXjvVert7s%3D
• ISSN: 1881414X
• ISSN: 0913946X
• NDL BIB ID: 4203760
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4203760
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed