THE MECHANISM OF SOFT X-RAY STIMULATED ETCHING REACTION IN THE SF_6/SiO_2 SYSTEM

• SEKIGUCHI-IKEURA Hiromi

  Electrotechnical Laboratory

• SEKIGUCHI Tetsuhiro

  Department of Synchrotron Radiation Facility Project, Japan Atomic Energy Research Institute

• TANAKA Kenichiro

  Department of Materials Science, Hiroshima University

収録刊行物

• Atomic collision research in Japan

  Atomic collision research in Japan 21 104-105, 1995-12-25

詳細情報

• CRID: 1571417124042112000
• NII論文ID: 10002401985
• NII書誌ID: AA11068271
• 本文言語コード: en
• データソース種別:
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