MEAN VELOCITIES OF SPUTTERED AI FROM AI AND AI_2O_3 SURFACES BY Ar^+ BOMBARDMENT

• NIMURA T

  Department of Applied Physics, Faculty of Technology, Tokyo University of Agriculture and Technology

• WADA R

  Department of Applied Physics, Faculty of Technology, tokyo University of Agriculture and Technology

• TSURUBUCHI S

  Department of Applied Physics, Faculty of Technology, tokyo University of Agriculture and Technology

収録刊行物

• Atomic collision research in Japan

  Atomic collision research in Japan 24 69-69, 1998-11

詳細情報

• CRID: 1570009749158633216
• NII論文ID: 10002402693
• NII書誌ID: AA11068271
• 本文言語コード: en
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