Double Schottky Diode-Type Gas Sensor for Discriminative Detection of Phosphine and Hydrogen.

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  • TODA Kei
    Department of Chemistry, Faculty of Science, Kumamoto University
  • SHIMIZU Tetsuo
    Research and Development Department, STEC Inc.
  • SANEMASA Isao
    Department of Chemistry, Faculty of Science, Kumamoto University

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Abstract

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論文(Article)

In this work, an attempt was made to obtain a single semiconductor to hold both Au and Pd films in parallel on it in the hope of detecting hydrogen and phosphine. We propose here a new sensor structure called a "double Schottky diode-type gas sensor", which is available for wider applications.

http://www.jsac.or.jp/cgi-bin/analsci/toc/

Journal

  • Analytical Sciences

    Analytical Sciences 11 (2), 317-318, 1995

    The Japan Society for Analytical Chemistry

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