Advanced Helium Glow-Discharge Emission Source by Conducting d.c. Self-Bias Current in the 13.56 MHz Radio Frequency Plasma.

• MATSUTA Hideyuki

  Institute for Materials Research, Tohoku University

• WAGATSUMA Kazuaki

  Institute for Materials Research, Tohoku University

Journal

• Analytical Sciences

  Analytical Sciences 15 (4), 319-320, 1999

  The Japan Society for Analytical Chemistry

Keywords

• Analytical Chemistry

Details

• CRID: 1390001204254962816
• NII Article ID: 10002419319
• NII Book ID: AA10500785
• DOI: 10.2116/analsci.15.319
• COI: 1:CAS:528:DyaK1MXisVSnt7k%3D
• ISSN: 13482246
• ISSN: 09106340
• ISSN: http://id.crossref.org/issn/09106340
• Web Site: https://link.springer.com/content/pdf/10.2116/analsci.15.319.pdf
• Web Site: https://link.springer.com/article/10.2116/analsci.15.319/fulltext.html
• Web Site: http://www.jstage.jst.go.jp/article/analsci/15/4/15_4_319/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles