酸化物薄膜表面の水に対するぬれ性と摩擦係数 Wettability and Friction Coefficient of the Oxide Thin Film Surface
We sputter-deposited oxide thin films such as Y<sub>2</sub>O<sub>3</sub>, SiO<sub>2</sub>, TiO<sub>2</sub>, Ta<sub>2</sub>O<sub>5</sub>, CeO<sub>2</sub>, and MoO<sub>3</sub> and studied water droplet wettability and the surface friction coefficient under the controlled conditions of 20-25°C and 50-60% RH. Water droplet wettability was evaluated by measuring the contact angle. We found that the angle increased and saturated over time for all tested oxide thin films and that contact angle saturation depended on the type of oxide thin films used. The relationship between the contact angle and <i>r/Z</i> (ion radius divided by cation charge) suggests that the oxide surface structure affects adsorption states. We also found that the thin film surface friction coefficient also decreased over time in line with variations in the contact angle. The correspondence between the friction coefficient and adhesion derived from the contact angle means that friction originates in adhesive force.
- 表面技術 = The Journal of the Surface Finishing Society of Japan
表面技術 = The Journal of the Surface Finishing Society of Japan 49(2), 191-194, 1998-02-01
The Surface Finishing Society of Japan