Nondestructive Depth Profiling by Glancing-Incidence and-Takeoff X-ray Fluorescence

• TSUJI Kouichi

  Department of Analytical Science, Institute for Materials Research, Tohoku University

• SATO S.

  Department of Analytical Science, Institute for Materials Research, Tohoku University

• HIROKAWA Kichinosuke

  Department of Analytical Science, Institute for Materials Research, Tohoku University

Journal

• Materials transactions, JIM

  Materials transactions, JIM 37 (3), 295-298, 1996-03

Keywords

• depth profiling
• X-ra fluorescence
• thin film
• Au-Si interface reaction
• total reflection

Details

• CRID: 1571980073996488064
• NII Article ID: 10002447316
• NII Book ID: AA10699969
• ISSN: 09161821
• Text Lang: en
• Data Source:
  • CiNii Articles