Contamination, Adsorption and Reaction of Si Surface with Carbonaceous Gases. Adsorption of Carbonaceous Gases on Si Surfaces.

• TAKAOKA Tsuyoshi

  Research Institute for Scientific Measurements, Tohoku University

• KUSUNOKI Isao

  Research Institute for Scientific Measurements, Tohoku University

Bibliographic Information

Other Title

• Ｓｉ表面の炭素系ガスによる汚染，吸着，反応　　シリコン表面への炭素系ガスの吸着
• シリコン ヒョウメン エ ノ タンソケイ ガス ノ キュウチャク

Journal

• Shinku

  Shinku 41 (12), 981-991, 1998

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390001204065129728
• NII Article ID: 10002475746
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.41.981
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 971126
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I971126
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles