ランド/グルーブ基板への均一スパッタ成膜の検討 Study of Uniform Sputtering Deposition Method for Magneto-Optical Disk with Land/Groove Substrate
Uniformity of the thickness of magnetic film on land/groove substrate was improved using collimated-sputtering method. The magnetic properties of TbFeCo films and interface wall energy of exchange-coupled double layer DyFeCo/TbFeCo films were compared with conventional sputtering method. There was not much difference of the magnetic properties and interface wall energy between two sputtering methods. It was confirmed that this method was effective in production of high recording density MO disk using land/groove substrate.
真空 41(12), 1034-1038, 1998-12-20
The Vacuum Society of Japan