in situ 450℃ベーキングによるSUS304のガス放出低減 Reduction of Outgassing from Type 304 Stainless Steel by in situ 450℃ Baking
In situ baking at 450°C was performed for a chamber of type 304 stainless steel, the outside surface of which was exposed to the atmosphere. The amount of hydrogen evacuated during the baking was no more than 0.41 ppm of the chamber in mass. In the following evacuation processes, an outgassing rate after 200°C baking was reduced to 1/16 of that before the 450°C baking. It is comparable to an outgassing rate reached by a chambe of type 304 stainless steel which was pre-baked at 450°C in a vacuum furnace. These results show that an in situ baking is as useful as a baking in furnace for outgassing reduction. They also suggest that surface modification induced by baking plays an important role in outgassing reduction.
真空 42(1), 37-40, 1999-01
The Vacuum Society of Japan