モリブデンの水素及び重水素リテンション特性 Hydrogen and Deuterium Retention Properties of Molybdenum
Thermal desorption properties of hydrogen and deuterium retained in polycrystalline molybdenum were studied by using a technique of thermal desorption spectroscopy, after hydrogen or deuterium ion irradiation with an ECR ion source. The energy of H<SUP>+</SUP> or D<SUP>+</SUP> was 1.7 keV. Thermal desorption spectra of H<SUB>2</SUB> or D<SUB>2</SUB> had a peak at around 200°C and a shoulder at temperature higher than 200°C. The peak temperature shifted to higher direction as the fluence increased. The amount of retained hydrogen or deuterium increased with the fluence. The retention did not saturate in the fluence range up to 10<SUP>19</SUP> ions/cm<SUP>2</SUP>. The amount of retained hydrogen or deuterium decreased with increase in irradiation temperature. At 100°C, the deuterium retention was approximately a half of that at RT. After irradiation at 200°C, only little desorption was observed.
真空 42(3), 135-138, 1999-03
The Vacuum Society of Japan