スパッタリング法による薄膜型固体電解質燃料電池の特性 Properties of SOFC Having YSZ Electrolyte Thin Film Grown by Sputtering
Properties of yttria stabilized zirconia (YSZ) electrolyte thin films for solid oxide fuel cells (SOFCs), which were grown by RF magnetron sputtering method under the prepared conditions of the reduced pressure of 0.8 Pa and the substrate temperature of RT, have been investigated on the dependencies of the anneal temperatures and the sputtering RF powers. The sputtered films annealed at 1600°C were found to be the closed YSZ electrolytes having the bulk oxide structure without the pin-holes. A SOFC having the annealed YSZ electrolyte thin films indicated a stable power generation property with 0.9 V that this value nearly equals to the theoretical OCV.
真空 42(3), 151-154, 1999-03
The Vacuum Society of Japan