マイクロ波プラズマ化学気相合成法による薄膜型固体電解質燃料電池の特性 Properties of SOFC Having MSZ Electrolyte Thin Film Grown by PECVD
Properties of magnesia stabilized zirconia (MSZ) electrolyte thin films for solid oxide fuel cells (SOFCs), which were grown by the plasma-enhanced chemical vapor deposition (PECVD) method, have been investigated on the microwave power dependencies and the anneal effect. MSZ thin films grown by microwave power of 500 W were found to be the columnar and closed electrolytes having a higher conductivity of 10<SUP>-3</SUP> S/cm. A SOFC having the annealed MSZ electrolyte thin films indicated a stable power generation property with 0.5 V although its value was reduced to lower half than the theoretical OCV of 0.915 V.
真空 42(3), 155-158, 1999-03
The Vacuum Society of Japan