窒素プラズマに対する水素添加効果 [in Japanese] Effect of Hydrogen Dilution on Nitrogen Plasma [in Japanese]
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Measurements on optical emission intensities of nitrogen ion and nitrogen molecular, and on plasma parameters such as electron density were carried out to study on the influence of a hydrogen dilution to the nitrogen plasma. The emission intensities increased with admixing of hydrogen up to the hydrogen partial pressure ratio, P<SUB>H2</SUB>/P<SUB>N2</SUB>=0.5. Above the this ratio, the emission intensities decreased.<BR>The plasma density increased and the nitrogen gas pressure decreased with an increase of hydrogen partial pressure ratio. Then, the maxima of the emission intensities appeared at the hydrogen partial pressure ratio, P<SUB>H2</SUB>/P<SUB>N2</SUB>=0.5.<BR>A silicon sample was exposed to the plasma. Analysis for the surface atomic composition showed that the nitrogen amount in the surface was largest at the ratio, P<SUB>H2</SUB>/P<SUB>N2</SUB>=0.5.
- Journal of the Vacuum Society of Japan
Journal of the Vacuum Society of Japan 42(3), 175-178, 1999-03
The Vacuum Society of Japan