電界制御熱陰極マグネトロン真空計 A New Hot Cathode Magnetron Gauge with Electric Field Controlling
Poisson's equation, ∇<SUP>2</SUP>φ=-ρ/ε<SUB>0</SUB>, shows that if the electric potential distribution or electric field in the space in which ions are generated is held constant, the distribution of the electric charge density is constant. By dividing the ion collectors of the gauge into two sections, and controlling the distribution ratio of ion current at a constant level against pressure, a constant distribution of the electric charge density is secured. Based upon this idea, a prototype of the magnetron gauge is built.<BR>It is found that the ion collector current is directly proportional to the pressure in a range of 1×10<SUP>-5</SUP>2×10<SUP>-9</SUP> [Pa].
真空 42(3), 187-190, 1999-03
The Vacuum Society of Japan