電界制御熱陰極マグネトロン真空計のイオンコレクタ電極間距離 [in Japanese] Spacing among Ion Collector Electrodes of Hot Cathode Magnetron Gauge with Electric Field Controlling [in Japanese]
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A new magnetron vacuum gauge, having two ion collectors for controlling the electric field in the cylindrical anode, has been developed. The effect of the electrode structure on the ion currents were studied by varying the electrode spaces.<BR>It is found that the distribution ratio of the two ion currents is controllable when the spacing between the anode and shield electrodes, and further, between the two ion collector electrodes and the shield electrode are optimized. In this configuration the measured ion current is directly proportional to the pressure in a range of 3 × 10<SUP>-6</SUP>1 × 10<SUP>-4</SUP> Pa.
- Journal of the Vacuum Society of Japan
Journal of the Vacuum Society of Japan 42(3), 191-194, 1999-03
The Vacuum Society of Japan